Large operation range: Z axis: 50mm R axis: ±360°

Large load: 5N/19N

Repeated positioning accuracy: Z axis: ±0.001mm R axis: ±0.03°

Screw diameter: φ6/8mm

Product advantage: high precision, high silence and miniaturization

Technical advantage: Can realize up and down straight motion rotary motion hollow adsorption

Application industry: 3C/ semiconductor/medical machinery